San Diego, CA, United States of America

Jerome A Emilo


Average Co-Inventor Count = 25.0

ph-index = 1

Forward Citations = 17(Granted Patents)


Company Filing History:


Years Active: 2005

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1 patent (USPTO):Explore Patents

Title: Jerome A. Emilo: Innovator in Laser Technology

Introduction

Jerome A. Emilo is a prominent inventor based in San Diego, California, recognized for his contributions to laser technology. He holds a significant patent that enhances the capabilities of excimer lasers, vital for various high-tech applications.

Latest Patents

Jerome Emilo's noteworthy patent is the "Four KHz gas discharge laser system." This innovative excimer laser is designed to produce a high-quality pulsed laser beam at an impressive pulse rate of about 4,000 Hz, with pulse energies of around 5 mJ or greater. A preferred embodiment of this invention is the ArF excimer laser, specifically engineered as a light source for integrated circuit lithography. The advancement also includes an improved wavemeter with specialized software that meticulously monitors the output beam parameters and controls a rapidly functioning PZT-driven tuning mirror, ensuring that both the wavelength and pulse energy remain within specified limits. To enhance performance further, the laser system features a single tangential fan driven by two motors, effectively clearing discharge debris from the discharge area between the rapid pulses.

Career Highlights

Jerome Emilo's career is notably linked to his involvement with Cymer, Inc., a company primarily focused on developing advanced laser technologies. His work has played a significant role in improving excimer laser systems, catering to the needs of the semiconductor industry and integrated circuit fabrication.

Collaborations

Throughout his career, Jerome has collaborated with esteemed colleagues such as Christian J. Wittak and William N. Partlo. These professional relationships underscore the collaborative spirit within the fields of innovation and technology, contributing to advancements that benefit multiple sectors.

Conclusion

Jerome A. Emilo stands out as an influential inventor in the realm of laser technology. With his patented solutions and collaborative efforts, he continues to make valuable contributions that enhance the efficiency and effectiveness of laser systems in critical applications like integrated circuit lithography. His work exemplifies how innovations in technology can transform industries, paving the way for future advancements.

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