This inventor holds 3 USPTO granted patents and 3 published patent applications. Top assignee: Entegris, Inc.. Active years: 2022-2025.
Company Filing History:
Years Active: 2022-2025
Title: JeongYeol Yang: Innovator in Microelectronics
Introduction
JeongYeol Yang is a prominent inventor based in Gunpo, South Korea. He has made significant contributions to the field of microelectronics, particularly in the area of etching compositions and methods. With a total of 3 patents, Yang's work has been instrumental in advancing technologies used in electronic devices.
Latest Patents
Yang's latest patents include innovative solutions for selective etching processes. One of his notable inventions is the "Selective removal of metal oxide hard masks." This patent focuses on compositions that facilitate the selective etching of metal oxide hard masks, such as zirconium oxide and hafnium oxide, which are commonly used in microelectronic devices. The process is designed to work effectively in the presence of other materials, including polysilicon, silicon dioxide, silicon nitride, and tungsten.
Another significant patent is the "Nitride etchant composition and method." This invention provides compositions and methods for selectively etching titanium nitride while leaving molybdenum and other materials, such as aluminum oxide and silicon dioxide, unaffected. The compositions developed by Yang achieve titanium nitride etch rates exceeding 3.5 Å/minute, ensuring uniform recess top and bottom layers in patterns.
Career Highlights
JeongYeol Yang is currently employed at Entegris, Inc., where he continues to innovate in the field of microelectronics. His work has garnered attention for its practical applications in the industry, contributing to the development of more efficient manufacturing processes.
Collaborations
Yang collaborates with talented professionals in his field, including SeungHyun Chae and SeongJin Hong. These collaborations enhance the innovative potential of his projects and contribute to the advancement of technology in microelectronics.
Conclusion
JeongYeol Yang is a key figure in the microelectronics industry, with a focus on developing advanced etching compositions and methods. His contributions through his patents are paving the way for more efficient electronic device manufacturing.