Company Filing History:
Years Active: 2019-2025
Title: Jens Oster: Innovator in Photolithography Technology
Introduction
Jens Oster is a prominent inventor based in Ober-Ramstadt, Germany. He has made significant contributions to the field of photolithography, particularly in the development of methods and apparatuses that enhance the precision and efficiency of optical elements used in extreme ultraviolet (EUV) photolithography. With a total of four patents to his name, Oster's work is at the forefront of innovation in this critical area of technology.
Latest Patents
Oster's latest patents include an "Apparatus and method for removing a single particulate from a substrate." This invention focuses on an apparatus designed to remove individual particulates from substrates, especially optical elements used in EUV photolithography. The apparatus features an analysis unit that determines the material composition of the particulate and a gas injection system that provides a gas tailored to the particulate's constituents, facilitating its removal.
Another notable patent is the "Method and apparatus for ascertaining a repair shape for processing a defect of a photolithographic mask." This invention outlines a method for determining the repair shape needed to address defects in photolithographic masks. It involves calculating correction values based on the position of pattern elements that do not contact the defect, ensuring precise corrections to the repair shape.
Career Highlights
Jens Oster is currently employed at Carl Zeiss SMT GmbH, a leading company in the field of optical systems and photolithography. His work at Zeiss has allowed him to push the boundaries of technology and contribute to advancements that are essential for modern manufacturing processes in the semiconductor industry.
Collaborations
Oster collaborates with talented professionals in his field, including Kinga Kornilov and Tristan Bret. These collaborations enhance the innovative capacity of his projects and contribute to the successful development of new technologies.
Conclusion
Jens Oster's contributions to photolithography through his patents and work at Carl Zeiss SMT GmbH highlight his role as a key innovator in the industry. His inventions are paving the way for advancements in optical technology, ensuring continued progress in semiconductor manufacturing.