This inventor holds 2 USPTO granted patents. Top assignees: Kla Tencor Corporation, Tencor Instruments. Active years: 1996-1998.
Company Filing History:
Years Active: 1996-1998
Title: Innovations of Jennming Chen
Introduction
Jennming Chen is a notable inventor based in Campbell, CA (US). He has made significant contributions to the field of film measurement systems and ellipsometry. With a total of 2 patents, his work focuses on improving calibration methods for advanced measurement devices.
Latest Patents
One of his latest patents is a "Film measurement system with improved calibration." This invention addresses the challenges faced by film measurement devices, such as spectroscopic ellipsometers and spectroreflectometers, which can experience shifts in calibration due to temperature, humidity, and mechanical factors. By utilizing one or more wavelength markers provided by the light source or reference sample, the calibration function can be corrected effectively. The method involves noting the pixel positions of these markers during calibration and adjusting for any shifts that occur.
Another significant patent is the "Method and system for calibrating an ellipsometer." This invention outlines a method for calibrating an ellipsometer, which includes a processor programmed to control various components and process data automatically. The method determines coarse approximations of specific values and refines them by processing reflectivity data obtained at multiple analyzer angles. This innovative approach enhances the accuracy of ellipsometric measurements.
Career Highlights
Jennming Chen has worked with prominent companies in the industry, including Kla Tencor Corporation and Tencor Instruments. His experience in these organizations has contributed to his expertise in the field of optical measurement technologies.
Collaborations
Throughout his career, Jennming has collaborated with talented individuals such as Xing Chen and Joseph R. Carter. These partnerships have likely fostered innovation and advancements in their respective projects.
Conclusion
Jennming Chen's contributions to the field of film measurement and ellipsometry demonstrate his commitment to innovation and excellence. His patents reflect a deep understanding of the challenges in measurement technology and provide solutions that enhance accuracy and reliability.