Jennifer Watia Tiller

Title: Innovations of Jennifer Watia Tiller

Introduction

Jennifer Watia Tiller is a prominent inventor based in Santa Clara, CA. She has made significant contributions to the field of substrate processing technology. With a total of 3 patents to her name, her work has had a substantial impact on the industry.

Latest Patents

One of her latest patents is titled "Flow-formed chamber component having a textured surface." This invention involves a method of fabricating a component for a substrate processing chamber. It includes providing a preform with internal and external surfaces and a mandrel with a textured surface. The process applies pressure to the external surface of the preform, allowing it to plastically deform over the mandrel's textured surface. This results in a component with a textured internal surface designed to adhere process residues generated during substrate processing.

Another notable patent is the "Ground shield with reentrant feature." This invention provides a ground shield for use in a physical vapor deposition (PVD) chamber. The ground shield features a cylindrical body with an outer wall and an inner wall that includes a reentrant feature. This design prevents arching between the shield and target, promoting greater process uniformity and extending the service life of chamber components.

Career Highlights

Jennifer is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display technology sectors. Her innovative work has positioned her as a key player in advancing substrate processing technologies.

Collaborations

Throughout her career, Jennifer has collaborated with notable colleagues, including Marc O'Donnell Schweitzer and Stephen Abney. These collaborations have further enhanced her contributions to the field.

Conclusion

Jennifer Watia Tiller's innovative patents and contributions to substrate processing technology highlight her significant role in the industry. Her work continues to influence advancements in the field, showcasing her expertise and dedication to innovation.