The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2010
Filed:
Sep. 09, 2005
Stephen Abney, San Martin, CA (US);
Anthony Vesci, San Jose, CA (US);
Joseph F. Sommers, San Jose, CA (US);
Marc O'donnell Schweitzer, San Jose, CA (US);
Scott Dickerson, Lakewood, CO (US);
Jennifer Watia Tiller, Santa Clara, CA (US);
Stephen Abney, San Martin, CA (US);
Anthony Vesci, San Jose, CA (US);
Joseph F. Sommers, San Jose, CA (US);
Marc O'Donnell Schweitzer, San Jose, CA (US);
Scott Dickerson, Lakewood, CO (US);
Jennifer Watia Tiller, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method of fabricating a component for a substrate processing chamber involves providing a preform having internal and external surfaces, and providing a mandrel having a textured surface with a pattern of textured features comprising protrusions and depressions. The internal surface of the preform component is contacted with the textured surface of mandrel, and a pressure is applied to the external surface of the preform. The pressure is sufficiently high to plastically deform the preform over the textured surface of the mandrel to form a component having a textured internal surface comprising the pattern of textured feature that are shaped and sized to adhere process residues generated in the processing of substrates.