The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2007
Filed:
Feb. 11, 2004
Marc O'donnell Schweitzer, San Jose, CA (US);
Jennifer Watia Tiller, Santa Clara, CA (US);
Brian West, San Jose, CA (US);
Karl Brueckner, Santa Clara, CA (US);
Marc O'Donnell Schweitzer, San Jose, CA (US);
Jennifer Watia Tiller, Santa Clara, CA (US);
Brian West, San Jose, CA (US);
Karl Brueckner, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In a method of cleaning a surface of a substrate processing chamber component to remove process deposits, the component surface is cooled to a temperature below about −40° C. to fracture the process deposits on the surface. The surface can be cooled by immersing the surface in a low temperature fluid, such as liquid nitrogen. In another version, the component surface is heated to fracture and delaminate the deposits, and optionally, subsequently rapidly cooled to form more fractures. The component surface cleaning can also be performed by bead blasting followed by a chemical cleaning step.