Jeng-Hung Sun

Title: Innovations by Jeng-Hung Sun: Advancements in Thin Film Transistor Technology

Introduction

Jeng-Hung Sun, an esteemed inventor based in Tainan, Taiwan, has made significant contributions to the field of electronics, particularly in the manufacturing of thin film transistors. With a portfolio of four patents, his innovations focus on enhancing the reliability and efficiency of semiconductor technologies.

Latest Patents

Among his notable inventions is the patent for a "Multi-layer gate for TFT and method of fabrication." This cutting-edge method describes the fabrication process of a thin film transistor characterized by a multi-layered gate structure. A spin-coated organic polymeric material is utilized to planarize a metal gate with a thin layer of molybdenum. The invention introduces a novel dry etching process that employs a UV spectrum for effective endpoint detection, eliminating issues traditionally associated with thick metal gate insulation, such as step coverage and void formation.

Another significant patent is the "Manufacturing method for improving reliability of polysilicon thin film transistors." This innovation addresses the electric leaking problem arising from the roughness of polysilicon layer surfaces. By oxidizing the polysilicon layer to produce a silicon oxide layer, and subsequently removing it through an etching solution, the method effectively reduces surface roughness, thereby enhancing the reliability of the fabricated thin film transistors.

Career Highlights

Jeng-Hung Sun is currently affiliated with the Industrial Technology Research Institute, where he continues to pioneer advancements in semiconductor technology. His work focuses on solving critical challenges in the industry, reinforcing his reputation as a leading inventor in the field.

Collaborations

Throughout his career, Sun has worked alongside esteemed colleagues including Tinghui Huang and Jr-Hong Chen. These collaborations have fostered an environment of innovation, contributing to the development of advanced technologies in the realm of thin film transistors.

Conclusion

Jeng-Hung Sun’s patent portfolio reflects his commitment to refining and advancing thin film transistor technology. His innovative methods not only improve manufacturing processes but also set new standards for reliability in semiconductor applications. With his ongoing research and contributions at the Industrial Technology Research Institute, Sun continues to be a vital player in the field of electronics.