Jeng-Chiang Chuang

Title: Jeng-Chiang Chuang: Innovator in Semiconductor Technology

Introduction

Jeng-Chiang Chuang is a prominent inventor based in Kaohsiung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His innovative work focuses on improving processes within semiconductor manufacturing, particularly in etching and gas flow control systems.

Latest Patents

One of Jeng-Chiang Chuang's latest patents is the "Convex insert ring for etch chamber." This invention presents a new and improved insert ring designed for wafer support inside a processing chamber, specifically for dry etching of semiconductor wafer substrates. The insert ring features a generally convex inner surface that faces the wafer support, creating a gap or berline wall between the two. This design helps prevent or significantly reduce the accumulation of polymer material on the inner surface during the etching of multiple substrates, thereby eliminating or reducing polymer peeling and extending operational intervals between maintenance.

Another notable patent is the "Gas flow control system with interlock." This system is designed to control the flow of gases into a reaction chamber used in semiconductor device processing. It includes a safety interlock feature that prevents the inadvertent mixing of incompatible, reactive gases. The interlock is implemented through a control circuit that operates a valve system, allowing for individual control of gas flow from separate sources into the chamber. The circuit incorporates relay switches and timers to create a time delay, ensuring safe operation.

Career Highlights

Jeng-Chiang Chuang has established himself as a key figure in the semiconductor industry through his innovative patents and contributions. His work has not only advanced technology but has also improved safety and efficiency in semiconductor manufacturing processes.

Collaborations

Throughout his career, Jeng-Chiang has collaborated with notable colleagues, including Yung-Mao Hsu and Chih-Pen Yen. These collaborations have further enhanced his contributions to the field and fostered innovation within the industry.

Conclusion

Jeng-Chiang Chuang is a distinguished inventor whose work in semiconductor technology has led to significant advancements in manufacturing processes. His patents reflect a commitment to innovation and safety, making him a valuable asset to the industry.