Jeng-Cheng Liu

Title: Innovations of Jeng-Cheng Liu in Semiconductor Technology

Introduction

Jeng-Cheng Liu is a prominent inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approaches.

Latest Patents

One of his latest patents is focused on a composite etching stop in semiconductor process integration. This patent describes a new method of forming a composite etching stop layer. An etching stop layer is deposited on a substrate, selected from materials such as silicon carbide, silicon nitride, SiCN, SiOC, and SiOCN. A TEOS oxide layer is then deposited by plasma-enhanced chemical vapor deposition over the etching stop layer. The composite etching stop layer offers improved moisture resistance, better etching selectivity, and a lower dielectric constant compared to other etching stop layers.

Career Highlights

Jeng-Cheng Liu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to advance semiconductor technologies. His work has been instrumental in enhancing the efficiency and effectiveness of semiconductor processes.

Collaborations

He has collaborated with notable coworkers, including Lain-Jong Li and Tien-I Bao, contributing to various projects that push the boundaries of semiconductor innovation.

Conclusion

Jeng-Cheng Liu's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in semiconductor processes and materials.