Location History:
- Hsin-Chu, TW (2016 - 2023)
- Penghu County, TW (2015 - 2024)
- Hsinchu, TW (2024)
Company Filing History:
15 out of 40,635 
6 out of 4,573 
Years Active: 2015-2025
Title: Jen-Yang Chung: Innovator in EUV Technology
Introduction
Jen-Yang Chung, a prominent inventor based in Penghu County, Taiwan, has made significant contributions to the field of extreme ultraviolet (EUV) technology. With an impressive portfolio of 20 patents, his work has been pivotal in advancing lithography processes critical to semiconductor manufacturing.
Latest Patents
Among his latest innovations are two notable patents related to EUV light sources and apparatus for lithography. The first patent outlines an extreme ultraviolet radiation source apparatus that incorporates various components, including a collector and a target droplet generator designed for producing tin (Sn) droplets. It features a rotatable debris collection device engineering with coated vanes that play a crucial role in enhancing performance by reducing SnH to Sn.
The second patent focuses on an extreme ultraviolet control system that optimizes a droplet illumination and detection module. This system intelligently adjusts the droplet illumination parameters based on the intensity of detected light, ensuring consistent functionality within acceptable ranges.
Career Highlights
Throughout his career, Jen-Yang Chung has worked with leading companies in the technology sector. Most notably, he has been associated with Taiwan Semiconductor Manufacturing Company Ltd., known for its advanced semiconductor production capabilities, as well as with AU Optronics Corporation, a leader in display technology. His experience in these prestigious companies has facilitated his innovative edge in EUV technology.
Collaborations
In his endeavors, Chung has collaborated with esteemed colleagues, including Shang-Chieh Chien and Li-Jui Chen. Their joint efforts have contributed significantly to the development of groundbreaking technologies in the semiconductor field.
Conclusion
Jen-Yang Chung's remarkable achievements and contributions to EUV technology exemplify the vital role of innovation in the semiconductor industry. With a robust patent portfolio and collaboration with industry leaders, he continues to be a driving force in the advancement of lithography processes, shaping the future of technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.