Jen-Tsung Lin

Title: The Innovative Contributions of Jen-Tsung Lin

Introduction

Jen-Tsung Lin is a prominent inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of five patents. His work focuses on methods that enhance the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

One of Lin's latest patents is titled "Method for avoiding polysilicon film over etch abnormal." This innovative method involves cleaning a semiconductor substrate and forming a dielectric layer on it. A first silicon source gas is injected into a reaction chamber to create a first polysilicon film over the dielectric layer. Following this, a second silicon source gas is introduced to form a second polysilicon film over the first, with the second gas having a different growth rate. A patterned photoresist layer is then applied, and a dry etching process is performed to etch through both polysilicon films until the dielectric layer is exposed. Finally, the photoresist layer is removed.

Another notable patent is the "Method for recycling monitoring control wafers." This method includes cleaning wafers after conducting a sheet resistance measurement on a bare silicon monitoring control wafer. The wafer is then converted into a recyclable control wafer for thermal wave measurements. This process involves forming a screen layer, performing ion implantation, and driving implanted ions deeper into the substrate, ultimately leading to a recycling process for the wafer.

Career Highlights

Throughout his career, Jen-Tsung Lin has worked with several notable companies, including United Microelectronics Corporation and United Silicon Incorporated. His experience in these organizations has allowed him to develop and refine his innovative techniques in semiconductor manufacturing.

Collaborations

Lin has collaborated with several professionals in his field, including Eddie Chen and Tsung-Hsien Han. These collaborations have contributed to the advancement of semiconductor technologies and the successful implementation of his patented methods.

Conclusion

Jen-Tsung Lin's contributions to semiconductor technology through his innovative patents demonstrate his expertise and commitment to advancing the field. His work continues to influence the industry and pave the way for future innovations.