Jen Song Liu

Title: Innovations of Inventor Jen Song Liu

Introduction: Jen Song Liu is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on improving processes and systems within the semiconductor manufacturing industry.

Latest Patents: One of his latest patents is a photoresist supply system with air venting. This innovative system is designed for pumping resist to a wafer coating machine. It includes a line that returns a selected proportion of the resist entering the resist pump to the resist supply tank. The return line to the tank is connected to the pump outlet at a higher point than the pump outlet to the wafer coating machine. The resist that is returned to the tank carries substantially all of the bubbles that are present in the resist entering the tank. This design allows for the removal of bubbles from the resist in the tank, enabling the resist to be used normally. Another notable patent is related to a metal contact to a novel polysilicon contact extension. This method allows for the formation of a metal contact structure to an underlying polysilicon contact extension structure without degrading it during the patterning procedure. The process involves opening a hole in an insulator layer to access the underlying polysilicon extension structure, ensuring that the polysilicon contact extension is not exposed to the RIE procedures used to define the metal contact structure.

Career Highlights: Jen Song Liu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise and innovative approaches have significantly contributed to the company's advancements in technology.

Collaborations: Throughout his career, Jen has collaborated with notable colleagues, including Jen Shang Fang and Hao Wei Chang. These partnerships have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion: Jen Song Liu's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in manufacturing processes and systems.