This inventor holds 1 USPTO granted patent. Top assignee: Worldwide Semiconductor Manufacturing Corporation. Active years: 2002.
Company Filing History:
Years Active: 2002
Title: The Innovative Contributions of Jen-Hui Tseng
Introduction
Jen-Hui Tseng is a notable inventor based in Changhua, Taiwan. He has made significant contributions to the field of semiconductor technology. His work focuses on developing advanced methods that enhance the manufacturing processes in the semiconductor industry.
Latest Patents
One of Jen-Hui Tseng's key inventions is a patent titled "Method for forming an attenuated phase-shifting mask." This invention discloses a method for forming an attenuated phase-shifting mask, which includes several steps. A transparent plate is provided, on which a phase-shifting layer, opaque layer, and undeveloped photoresist layer are stacked successively. A first part of the photoresist layer is removed until exposing a first region of the opaque layer. The first region of the opaque layer is then removed to expose parts of the phase-shifting layer. A second part of the photoresist layer is removed to expose a second region of the opaque layer. The exposed phase-shifting layer is then etched by employing the opaque layer as an etching mask. Finally, the exposed opaque layer and photoresist layer are successively removed, thus forming a complete attenuated phase-shifting mask. This innovative method has the potential to improve the efficiency and effectiveness of semiconductor manufacturing.
Career Highlights
Jen-Hui Tseng is currently employed at Worldwide Semiconductor Manufacturing Corporation, where he continues to push the boundaries of semiconductor technology. His expertise and innovative mindset have made him a valuable asset to the company.
Collaborations
Throughout his career, Jen-Hui Tseng has collaborated with several talented individuals, including Ching-Liang Wu and Yueh-Lin Chou. These collaborations have fostered an environment of innovation and creativity, leading to advancements in their respective fields.
Conclusion
Jen-Hui Tseng's contributions to the semiconductor industry through his innovative patent demonstrate his commitment to advancing technology. His work not only enhances manufacturing processes but also sets a foundation for future innovations in the field.