Jeffrey Gelpey

Title: The Innovations of Jeffrey Gelpey

Introduction

Jeffrey Gelpey is a notable inventor based in Peabody, MA (US). He has made significant contributions to the field of semiconductor technology. His work focuses on improving the quality and performance of semiconductor materials.

Latest Patents

One of Gelpey's key patents is the "UV pretreatment process for ultra-thin oxynitride formation." This innovative process involves pre-treating the oxynitride or oxide layer formed on a semiconductor substrate with UV-excited gas, such as chlorine or nitrogen. This treatment enhances the surface condition of the layer and increases the density of nucleation sites for subsequent silicon nitride deposition. The pre-treatment effectively reduces the root mean square surface roughness of thinner silicon nitride films, which are deposited on the oxynitride layer by chemical vapor deposition (CVD).

Career Highlights

Gelpey is currently associated with Mattson Technology, Inc., where he continues to advance semiconductor technologies. His expertise in the field has led to the development of innovative processes that improve semiconductor manufacturing.

Collaborations

Throughout his career, Gelpey has collaborated with talented individuals such as Sing-Pin Tay and Yao Zhi Hu. These collaborations have contributed to the success of his projects and the advancement of semiconductor technology.

Conclusion

Jeffrey Gelpey is a prominent inventor whose work in semiconductor technology has led to significant advancements. His innovative patent on UV pretreatment processes showcases his commitment to improving material quality in the industry.