Jeffrey A Brown

Title: **Innovator Spotlight: Jeffrey A. Brown**

Introduction

Jeffrey A. Brown, based in San Francisco, CA, is a notable inventor with a strong portfolio comprising five patents. His contributions to the field of deposition systems and substrate temperature control have significantly advanced technological applications in various industries.

Latest Patents

Among his latest innovations, one of Jeffrey’s most significant patents involves **substrate temperature control in an ALD reactor**. This invention describes a deposition system that incorporates a process chamber explicitly designed for atomic layer deposition (ALD). It features an electrostatic chuck (ESC) that retains the substrate, enhancing its thermal coupling through backside gas, which increases efficiency. The ESC is equipped with a coolant system and a resistive heater for precise temperature management.

Another key patent by Jeffrey focuses on **variable gas conductance control for a process chamber**. This innovation includes a process chamber and a stationary pedestal that supports a substrate. Jeffrey’s design also features a moveable shield that plays a crucial role in modulating the gas conductance path, allowing for controlled pressure adjustments within the chamber. Additionally, this design may incorporate gas channel openings and temperature control channels, which further optimize gas flow and process efficiency.

Career Highlights

Jeffrey has demonstrated his expertise through his work with prominent companies such as Novellus Systems Incorporated and Angstron Systems, Inc. His career reflects a commitment to innovation in the semiconductor industry, particularly in processes that enhance deposition and fabrication technologies.

Collaborations

Throughout his career, Jeffrey has worked alongside notable colleagues, including Tony P. Chiang and Karl Frederick Leeser. These collaborations have likely fostered an environment of creativity and technical prowess, facilitating the development of groundbreaking solutions in the field.

Conclusion

With five patents to his name and a profound influence on advancements in deposition systems, Jeffrey A. Brown’s contributions continue to resonate in the industry. As an inventor, his work not only showcases his ingenuity but also reinforces the importance of innovation in technology-driven sectors.