Jasper Goh

Title: The Innovative Mind of Jasper Goh

Introduction

Jasper Goh is a notable inventor based in Singapore, recognized for his contributions to the field of metrology. His innovative approach to assessing the accuracy of metrology tools has garnered attention in the industry. With a focus on multi-variable regression, Goh's work exemplifies the intersection of technology and precision measurement.

Latest Patents

Jasper Goh holds a patent for a method titled "Multi-variable regression for metrology." This patent describes a technique for assessing the accuracy of metrology tools by considering the interaction between different measurement parameters. The method involves using a metrology tool under test (MTUT) and a reference metrology tool (RMT) to measure a set of test profiles. The MTUT generates a data set for the first measurement parameter, while the RMT provides data sets for both the first and at least a second measurement parameter. By performing multi-variable regression, a best-fit plane is generated for the data sets, with the coefficient of determination (R-value) serving as the accuracy index of the MTUT.

Career Highlights

Jasper Goh is currently employed at Globalfoundries Singapore Pte. Ltd., where he applies his expertise in metrology and data analysis. His work has significantly contributed to the advancement of measurement technologies within the company. Goh's innovative methods have positioned him as a key figure in the field of precision measurement.

Collaborations

Jasper collaborates with talented colleagues, including Wen Zhan Zhou and Zheng Zou. Their combined efforts in research and development have fostered a productive environment for innovation.

Conclusion

Jasper Goh's contributions to metrology through his patented methods highlight his role as an influential inventor in Singapore. His work not only enhances the accuracy of measurement tools but also sets a standard for future innovations in the field.