Globalfoundries Singapore Pte. Ltd.

Jasper Goh

Mei Sheng Zhou

Zheng Zou

Wen Zhan Zhou

A method for assessing metrology tool accuracy is described. Multi-variable regression is used to define the accuracy of a metrology tool such that the interaction between different measurement parameters is taken into account. A metrology tool under test (MTUT) and a reference metrology tool (RMT) are used to measure a set of test profiles. The MTUT measures the test profiles to generate a MTUT data set for a first measurement parameter. The RMT measures the test profiles to generate RMT data sets for the first measurement parameter, and at least a second measurement parameter. Multi-variable regression is then performed to generate a best-fit plane for the data sets. The coefficient of determination (Rvalue) represents the accuracy index of the MTUT.

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Singapore, Singapore

Jasper Goh