Introduction: Jamyung Gu is a prominent inventor based in Chungcheongnam-do, South Korea, known for his significant contributions to substrate treatment technologies. With a total of four patents to his name, Gu is making noteworthy advancements in the field of plasma generation and substrate handling.

Latest Patents: Among his latest innovations, Gu has developed an apparatus and method for treating substrates. This innovative solution encompasses a chamber with a process space, a substrate support unit, a gas supply unit for infusing gas into the process space, and a plasma generation unit for creating plasma from the supplied gas. The substrate support unit is meticulously designed to include a substrate support part surrounded by a focus ring and equipped with an insulator featuring a groove that houses an electrode. Additionally, an impedance controller is integrated to adjust the electrode's impedance, featuring a resonance control circuit to optimize the current applied and an impedance control circuit to manipulate the angle of plasma ions at the substrate's edges.

Another patent from Gu involves an advanced substrate treating apparatus, which similarly incorporates a treatment chamber, a support unit for substrates, a gas supply unit, and a plasma generating unit. This apparatus presents an electrostatic chuck that secures the substrate and an extension part that incorporates a focus ring and a metallic ring for precision control of plasma at the substrate's extremities.

Career Highlights: Jamyung Gu's career is marked by his role at Semes Co., Ltd., where he continues to innovate and contribute to cutting-edge technologies in the semiconductor industry. His expertise in substrate treatment processes positions him as a valuable asset within the company and the sector.

Collaborations: Throughout his career, Gu has collaborated with notable colleagues, including Shin-Woo Nam and Jong Hwan An. Their collective efforts contribute to the development of advanced solutions within the industry, showcasing a strong team dynamic that drives innovation.

Conclusion: Jamyung Gu exemplifies the spirit of innovation through his inventive contributions and dedication to advancing substrate treatment technologies. His patents not only showcase his technical prowess but also highlight the potential for further advancements in the field. As he continues to work with Semes Co., Ltd. and collaborate with skilled professionals, the future of substrate treatment holds great promise with Gu at the forefront of innovation.

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