James S DeLuca

Title: Innovations of James S. DeLuca

Introduction

James S. DeLuca is a notable inventor based in Beverly, MA (US). He has made significant contributions to the field of ion implantation technology. With a total of 2 patents, his work focuses on enhancing the efficiency and effectiveness of ion beam processes.

Latest Patents

DeLuca's latest patents include a "Method and apparatus for continuous chained energy ion implantation." This invention describes an ion implantation system that selectively varies an ion beam energy to a workpiece in sequential passes. The system features an ion source for generating the ion beam and an acceleration/deceleration stage that adjusts the energy based on an electrical bias. Additionally, a workpiece support is designed to maintain the workpiece's temperature during the energy variation process.

Another significant patent is the "Blended energy implant." This invention involves ion implantation systems that implant varying energies of an ion beam across a workpiece. The system utilizes electrodes to control the final energy or path of the ion beam. A scanning apparatus is employed to enhance the precision of the implantation process, while a controller synchronizes the electrical bias signals to achieve the desired ion beam energy.

Career Highlights

James S. DeLuca is currently associated with Axcelis Technologies, Inc., where he continues to innovate in the field of ion implantation. His work has been instrumental in advancing the technology used in semiconductor manufacturing.

Collaborations

DeLuca has collaborated with notable coworkers such as Dwight Roh and Patrick Heres, contributing to the development of cutting-edge technologies in ion implantation.

Conclusion

James S. DeLuca's contributions to ion implantation technology through his patents and work at Axcelis Technologies, Inc. highlight his role as a significant innovator in the field. His inventions continue to influence advancements in semiconductor manufacturing processes.