Pleasanton, CA, United States of America

James McDiarmid


Average Co-Inventor Count = 3.1

ph-index = 8

Forward Citations = 394(Granted Patents)


Location History:

  • Pleasanton, CA (US) (1996 - 2002)
  • San Ramon, CA (US) (2002)

Company Filing History:


Years Active: 1996-2002

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10 patents (USPTO):Explore Patents

Title: Innovations of James McDiarmid in Semiconductor Processing

Introduction

James McDiarmid is a notable inventor based in Pleasanton, CA (US), recognized for his contributions to semiconductor processing technology. With a total of 10 patents to his name, McDiarmid has made significant advancements in the field, particularly in thermal processing systems.

Latest Patents

One of McDiarmid's latest patents is a system and method for thermal processing of a semiconductor substrate. This innovative system utilizes a stable heating source with a large thermal mass, which is advantageous compared to conventional lamp-heated systems. The design of the system is optimized to provide substantial heat flux to the wafer while minimizing heat loss to the surrounding environment. The heat source ensures a uniform temperature profile across the wafer, maintaining low variance across temperature ranges at low pressures. The system features a resistively heated block enclosed within an insulated vacuum cavity, enhancing the efficiency of the heating process. Additionally, the use of insulating walls made from reflective materials, such as polished tungsten, encapsulated within inert insulating materials like quartz, further improves insulation. The isothermal nature of the processing region can be enhanced through various methods, including multiple layers of insulation and the use of conductive gases.

Career Highlights

Throughout his career, McDiarmid has worked with prominent companies in the semiconductor industry, including Mattson Technology, Inc. and Ag Associates, Inc. His experience in these organizations has contributed to his expertise in developing advanced thermal processing systems.

Collaborations

Some of McDiarmid's notable coworkers include Kristian E Johnsgard and Brad S Mattson, who have also made significant contributions to the field of semiconductor technology.

Conclusion

James McDiarmid's innovative work in semiconductor processing has led to the development of advanced systems that enhance efficiency and performance. His contributions continue to impact the industry positively.

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