Saline, MI, United States of America

James M Marks


Average Co-Inventor Count = 3.8

ph-index = 3

Forward Citations = 176(Granted Patents)


Company Filing History:


Years Active: 1999-2005

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3 patents (USPTO):Explore Patents

Title: James M Marks: Innovator in Optical Pressure Sensing

Introduction

James M Marks, a notable inventor based in Saline, Michigan, is recognized for his innovative contributions to optical pressure sensing technologies. With three patents to his name, Marks has established himself as a valuable asset in his field, working at Sentec Corporation.

Latest Patents

Marks' latest inventions demonstrate his commitment to advancing technology. One of his prominent patents is the "Ultra-miniature optical pressure sensing system," which incorporates MEMS processing to create a sensor housing with a unique design featuring ribs and grooves. This innovative configuration allows the membrane to flex consistently in response to pressure, ensuring precise measurements.

Another significant patent by Marks is the "Holographic scatterometer for detection and analysis of wafer surface deposits." This advanced device can rapidly detect and analyze particle deposits on unpatterned wafer surfaces, determining their size and chemical composition. The scatterometer is particularly noteworthy for its ability to measure deposits smaller than 80 nm, overcoming limitations faced by existing instruments.

Career Highlights

Marks’ work at Sentec Corporation has placed him at the forefront of optical sensing technology. His contributions not only enhance product capabilities but also drive innovation within the company. His dedication to research and development has led to significant advancements in the field.

Collaborations

Throughout his career, Marks has collaborated with talented colleagues, including Takeo Sawatari and Alex Klooster. These collaborative efforts have fostered an environment of creativity and innovation, leading to the development of cutting-edge technologies in optical sensing and wafer analysis.

Conclusion

James M Marks stands out as a prominent inventor, pushing the boundaries of optical sensing technology. His latest patents reflect his innovative spirit and dedication to enhancing technological capabilities. As he continues to work at Sentec Corporation, the impact of his inventions is sure to resonate within the industry, paving the way for future advancements in optical pressure sensing.

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