The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2005
Filed:
Feb. 21, 2003
Takeo Sawatari, Walled Lake, MI (US);
Alex Klooster, Ann Arbor, MI (US);
Dean M. Aslam, Okemos, MI (US);
Yuping Lin, West Bloomfield, MI (US);
James Marks, Saline, MI (US);
Takeo Sawatari, Walled Lake, MI (US);
Alex Klooster, Ann Arbor, MI (US);
Dean M. Aslam, Okemos, MI (US);
Yuping Lin, West Bloomfield, MI (US);
James Marks, Saline, MI (US);
Sentec Corporation, Walled Lake, MI (US);
Abstract
The fiber optic pressure sensing system includes a sensor housing formed using MEMS processing. The sensor housing has ribs and grooves in both horizontal and vertical directions relative to the surface to allow the membrane to flex in a consistent manner. The flexing of the membrane allows the pedestal to be repeatedly positioned in response to pressure acting on the extension of the sensor head and membrane.