Location History:
- Bloomfield Hills, MI (US) (1999 - 2003)
- Walled Lake, MI (US) (2005)
Company Filing History:
Years Active: 1999-2005
Title: Innovator Takeo Sawatari: Pioneering Advances in Optical Sensing
Introduction
Takeo Sawatari, based in Bloomfield Hills, MI, is a prominent inventor known for his extensive work in the field of optical sensing. With a total of 8 patents to his name, Sawatari has developed groundbreaking technologies that significantly enhance the capabilities of pressure measurement and surface analysis in semiconductor processes.
Latest Patents
Sawatari's recent innovations include an ultra-miniature optical pressure sensing system. This unique fiber optic pressure sensing system features a sensor housing created through MEMS processing, which incorporates intricate ribs and grooves. These design elements allow the membrane to flex consistently in response to varying pressure levels, facilitating accurate positioning of the sensor head and its membrane.
Another notable patent is his development of a holographic scatterometer for the detection and analysis of wafer surface deposits. This advanced scatterometer is capable of rapidly identifying unwanted deposits or defects on unpatterned wafer surfaces. It also determines the volume density and location of these deposits with an impressive capacity to measure particles smaller than 80 nm. This capability is particularly significant, as existing scatterometer instruments typically struggle with such minute measurements. The technology can be utilized both in-line during wafer processing and as a standalone analysis device.
Career Highlights
Takeo Sawatari has made significant contributions to the field of semiconductor technology through his role at Sentec Corporation. His work has not only facilitated advancements in optical sensing but has also aided in enhancing semiconductor fabrication processes.
Collaborations
Throughout his career, Sawatari has collaborated with notable coworkers such as Philip A. Gaubis and Alex Klooster, who have contributed their expertise to further develop and refine his innovations. These collaborations have been essential in pushing the boundaries of what is possible in optical sensing technology.
Conclusion
Takeo Sawatari continues to be an influential figure in the realm of optical sensing and semiconductor technology. His innovative patents reflect a commitment to advancing precision measurement techniques, ultimately paving the way for future developments in the industry. With a strong professional network and a focus on collaboration, Sawatari's contributions are likely to leave a lasting impact on the field for years to come.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.