Sentec Corporation

James M Marks

Takeo Sawatari

Alex Klooster

Yuping Lin

Philip A Gaubis

Dean M Aslam

The fiber optic pressure sensing system includes a sensor housing formed using MEMS processing. The sensor housing has ribs and grooves in both horizontal and vertical directions relative to the surface to allow the membrane to flex in a consistent manner. The flexing of the membrane allows the pedestal to be repeatedly positioned in response to pressure acting on the extension of the sensor head and membrane.

Ultra-miniature optical pressure sensing system

A holographic scatterometer with continuous readout can rapidly identify the presence of deposits (particles or other defects) on an unpatterned wafer surface and determine the volume density (size) and location. The scatterometer can also determine chemical composition of the detected deposits. The range of the deposit (particle) size to be measured is below 80 nm, which currently existing scatterometer type instruments cannot readily detect. The inspection can be achieved as an in-line stage during the processing of wafers or in situ in combination with another processing tool or as a separate off-line analysis device.

Holographic scatterometer for detection and analysis of wafer surface deposits

A scatterometer for detecting and analyzing wafer surface defects includes a light source generating a beam of light and a photodetector. Optics are used for splitting the beam of light into a reference beam and a detection beam. Optics also direct the reference beam and the detection beam to the photodetector through different optical paths. The optics direct the detection beam to the surface of the wafer and when incident upon a defect creates a scattered beam. The optics direct the scattered beam to the photodetector. A driver moves the surface of the wafer with respect to the detection beam. A computer coupled to the photodetector determines the presence of a defect on the surface by analyzing an interference pattern from the superposition of the reference beam and the scattered beam.

Growing community of inventors

Saline, MI, United States of America

James M Marks