Milpitas, CA, United States of America

James E Tappan


Average Co-Inventor Count = 2.1

ph-index = 5

Forward Citations = 188(Granted Patents)


Location History:

  • Milpitas, CA (US) (1993 - 1994)
  • Fremont, CA (US) (2011 - 2022)

Company Filing History:


Years Active: 1993-2025

where 'Filed Patents' based on already Granted Patents

21 patents (USPTO):

Title: **Innovative Contributions of James E. Tappan in Plasma Processing Technology**

Introduction

James E. Tappan, an accomplished inventor based in Milpitas, CA, has made significant strides in the field of plasma processing technology. With an impressive portfolio of 20 patents, Tappan's work has contributed to advancements that are crucial to the semiconductor industry.

Latest Patents

Some of his latest patents include innovative devices designed to enhance plasma processing. One such patent involves plasma processing devices featuring multi-port valve assemblies. This device consists of a plasma processing chamber, plasma electrode assembly, wafer stage, and a unique multi-port valve assembly. This assembly is designed with a movable seal plate that ensures precise control over the vacuum ports, optimizing the plasma environment for improved processing efficiency. Another notable patent focuses on a substrate support system, providing spatial and temporal control of temperature during plasma processing. This technology incorporates a temperature-controlled base and a specialized film heater, ensuring optimal temperature management of semiconductor substrates throughout the processing phase.

Career Highlights

Tappan currently works at Lam Research Corporation, a leading company in providing innovative semiconductor processing solutions. His role there has been pivotal in developing advanced technologies that cater to the evolving needs of the semiconductor industry.

Collaborations

Throughout his career, Tappan has collaborated with distinguished colleagues, including Anthony J. Ricci and Keith Laurence Comendant. These partnerships have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies in plasma processing.

Conclusion

James E. Tappan's contributions to plasma processing technology through his patents and collaborative efforts have significantly impacted the semiconductor industry. His innovative devices address challenges faced in plasma processing, demonstrating his commitment to advancing technology in this critical field. With a track record of success and continued dedication to innovation, Tappan's work will likely inspire future advancements in semiconductor technology.

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