This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignees: Samsung Electronics Co., Ltd., Sungkyunkwan University. Active years: 2022-2023.
Company Filing History:
2 out of 132,107 
1 out of 1,346 
Years Active: 2022-2023
Title: Jaewhan Sung: Innovator in Extreme Ultraviolet Technology
Introduction
Jaewhan Sung is a prominent inventor based in Suwon, South Korea. He has made significant contributions to the field of extreme ultraviolet (EUV) technology, holding 2 patents that showcase his innovative spirit and technical expertise.
Latest Patents
Sung's latest patents include an "Apparatus for generating extreme ultraviolet (EUV), method of manufacturing the same, and EUV system." This apparatus features a raw material supply unit that provides a plasma source for generating EUV light. The EUV light source unit utilizes a laser to create plasma from the plasma source. Additionally, a filter is designed to extract EUV light from the generated light. The invention also includes a protective layer and a frame that exposes a portion of the filter or protective layer, optimizing the efficiency of the EUV light generation process.
Another notable patent is the "Extreme ultraviolet (EUV) mask inspection system, a load-lock chamber included therein, and a method for inspecting an EUV mask using the EUV mask inspection system." This system comprises a mask receiving unit for the manufactured EUV mask, a main chamber for conducting inspections, and a load-lock chamber positioned between the mask receiving unit and the main chamber. The load-lock chamber is equipped with a mask table, a UV lamp for evaporating water molecules on the EUV mask, and a cold trap to capture these evaporated molecules, ensuring the integrity of the inspection process.
Career Highlights
Jaewhan Sung has worked with notable organizations such as Samsung Electronics Co., Ltd. and Sungkyunkwan University. His experience in these institutions has allowed him to develop and refine his expertise in EUV technology, contributing to advancements in the field.
Collaborations
Sung has collaborated with talented individuals in his field, including Jihoon Na and Hyunjune Cho. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Jaewhan Sung is a distinguished inventor whose work in extreme ultraviolet technology has led to significant advancements in the field. His patents reflect his commitment to innovation and his contributions to the industry will undoubtedly have a lasting impact.