Company Filing History:
Years Active: 2019-2025
Title: **Jae Wan Lee: Innovator in Substrate Processing Technology**
Introduction
Jae Wan Lee, a prominent inventor based in Gwangju-si, South Korea, has made significant strides in the field of substrate processing technology. With a total of 5 patents to his name, Lee's innovative approaches are reshaping the capabilities of processing apparatus in various applications.
Latest Patents
One of Lee's latest patents, titled "Method for Cleaning Chamber of Substrate Processing Apparatus," introduces a novel chamber cleaning methodology. This method involves a chamber stabilizing process that efficiently transports a substrate after a thin film deposition process, ensuring cleanliness and operational effectiveness. The cleaning process incorporates the injection of a cleaning gas to etch and eliminate byproducts, followed by a coating process that generates a protective film on the chamber's inner surfaces using materials like aluminum (Al), zirconium (Zr), or hafnium (Hf).
Another noteworthy patent is the "Substrate Processing Apparatus," which features adjustable electrode positions to address thermal expansion differences. This advancement not only prevents short circuits between the first and second electrodes during temperature fluctuations but also ensures uniform thin film application, particularly beneficial for large substrates.
Career Highlights
Jae Wan Lee is currently affiliated with Jusung Engineering Co., Ltd., a company known for its cutting-edge technology in substrate processing systems. His work in this company has established him as a key player in developing innovative solutions that enhance processing efficiencies and reliability.
Collaborations
Throughout his career, Lee has collaborated with notable colleagues, including Yong Hyun Kim and Yoon Jeong Kim. These partnerships have fostered a creative environment that encourages the exchange of ideas and promotes the advancement of technology in their field.
Conclusion
Jae Wan Lee's contributions to the substrate processing industry exemplify the importance of innovation and collaboration in driving technological advancement. With a solid foundation of patents and a commitment to excellence, he continues to pave the way for future developments in substrate processing technologies.