Company Filing History:

3 out of 101

Fsi International, Inc.

patents

Years Active: 2001-2005

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3 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6838115 - Thermal processing system and methods for forming low-k dielectric films suitable for incorporation into microelectronic devices (2005-01-04),

2. 6423947 - Thermal processing chamber for heating and cooling wafer-like objects (2002-07-23),

3. 6307184 - Thermal processing chamber for heating and cooling wafer-like objects (2001-10-23),

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Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.

For the Inventor, By the Inventor

Jack S Kasahara

Company Filing History:

Years Active: 2001-2005