Location History:
- Seoul, KR (2003)
- Suwon, KR (2006)
Company Filing History:
Years Active: 2003-2006
Title: In-jun Yeo: Innovator in Semiconductor Cleaning Technologies
Introduction
In-jun Yeo is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor cleaning technologies, holding a total of 5 patents. His innovative approaches have enhanced the efficiency and effectiveness of cleaning processes in semiconductor manufacturing.
Latest Patents
One of his latest patents is an "Apparatus and method for cleaning a semiconductor wafer." This apparatus includes an energy concentration relieving member positioned at the side of the wafer. An elongated portion of a probe extends over and is substantially parallel to the wafer surface. A vibrator is attached to the rear end of the probe for vibrating the probe, allowing the elongated portion to transfer acoustic vibrational energy to the wafer and dislodge debris.
Another notable patent is the "Megasonic cleaning apparatus for fabricating semiconductor devices." This apparatus is designed to remove contamination particles on a wafer. It includes a piezoelectric transducer for generating megasonic energy and an energy transfer rod that distributes this energy to the cleaning solution over the wafer. The energy transfer rod is shaped and sized to uniformly distribute energy in the radial direction of the wafer, effectively removing contamination particles.
Career Highlights
In-jun Yeo is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate and develop advanced cleaning technologies for semiconductor manufacturing. His work has been instrumental in improving the quality and reliability of semiconductor devices.
Collaborations
He has collaborated with notable colleagues, including Byoung-moon Yoon and Sang-rok Hah, contributing to various projects that enhance semiconductor cleaning processes.
Conclusion
In-jun Yeo's contributions to semiconductor cleaning technologies have made a significant impact on the industry. His innovative patents and ongoing work at Samsung Electronics Co., Ltd. continue to push the boundaries of what is possible in semiconductor manufacturing.