The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2006
Filed:
Mar. 10, 2003
In-jun Yeo, Suwon, KR;
Byoung-moon Yoon, Suwon, KR;
Kyung-hyun Kim, Seoul, KR;
Sang-rok Hah, Seoul, KR;
Jeong-lim Nam, Yongin, KR;
Hyun-ho JO, Seoul, KR;
In-jun Yeo, Suwon, KR;
Byoung-moon Yoon, Suwon, KR;
Kyung-hyun Kim, Seoul, KR;
Sang-rok Hah, Seoul, KR;
Jeong-lim Nam, Yongin, KR;
Hyun-ho Jo, Seoul, KR;
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Abstract
The apparatus for cleaning a wafer includes an energy concentration relieving member positioned at the side of the wafer. An elongated portion of a probe extends over and substantially parallel to the wafer surface. A vibrator is attached to a rear end of the probe for vibrating the probe such that the elongated portion transfers acoustic vibrational energy to the wafer and dislodges debris.