Location History:
- Gyeonggi-do, KR (2007)
- Yongin-si, KR (2007)
Company Filing History:
Years Active: 2007
Title: In-Hoi Doh: Innovator in Semiconductor Technology
Introduction
In-Hoi Doh is a prominent inventor based in Gyeonggi-do, South Korea. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to etching compositions and methods.
Latest Patents
His latest patents include an etching composition and methods for preparing the same, as well as methods for etching an oxide film and manufacturing a semiconductor device. One exemplary etching composition consists of about 0.1 to 8% by weight of hydrogen fluoride, about 10 to 25% by weight of ammonium fluoride, about 0.0001 to 3% by weight of a non-ionic polymer surfactant, and water. This composition allows for the selective removal of an oxide layer during a wet etching process while effectively passivating a pattern or storage electrode that includes polysilicon. The oxide layer can be removed with high etching selectivity, minimizing damage to the polysilicon layer.
Another patent focuses on a composition for removing photoresist and a method for forming a bump electrode in a semiconductor device using this composition. In this process, a passivation layer pattern with an opening is formed on a substrate that has a metal wiring pattern. A photoresist pattern is then created on the passivation layer, which has an opening that exposes the passivation layer's opening. Metal is electroplated in these openings to form a bump electrode, and the photoresist pattern is removed using a composition that includes monoethanolamine and dimethylacetamide.
Career Highlights
In-Hoi Doh is currently employed at Samsung Electronics Co., Ltd., where he continues to advance semiconductor technologies. His work has been instrumental in enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
He has collaborated with notable colleagues such as Sang-Mun Chon and Yong-Kyun Ko, contributing to a dynamic research environment that fosters innovation.
Conclusion
In-Hoi Doh's contributions to semiconductor technology through his patents and work at Samsung Electronics Co., Ltd. highlight his role as a key innovator in the field. His advancements in etching compositions and methods are paving the way for future developments in semiconductor manufacturing.