Company Filing History:
Years Active: 1982-1991
Title: The Innovative Contributions of Imad Mahawili
Introduction
Imad Mahawili is an accomplished inventor based in Sunnyvale, CA, recognized for his significant contributions to technology and engineering. With a total of seven patents to his name, Mahawili has made notable advancements primarily in the field of chemical vapor deposition and heating technologies.
Latest Patents
Mahawili's recent patents showcase his expertise in developing advanced heating systems. One of his latest innovations is the "Multi-zone planar heater assembly and method of operation." This invention involves a novel heater assembly designed for substrate processing, such as semiconductor wafers, within chemical vapor deposition (CVD) reactor chambers. The assembly features a dielectric heater base with multiple radially spaced heater element segments, allowing for independent regulation of each heater element. A heater shroud is included to maintain a blanket of inert gas, optimizing substrate processing.
Another significant patent is the "Chemical vapor deposition reactor and method of operation." This invention details a CVD reactor designed for single wafer processing with adjustable gas inlet orifices and exhaust ports. This adaptive design permits dynamic control of the gas flow, improving the uniformity and conformality of deposition on substrates.
Career Highlights
Over his career, Imad Mahawili has worked with reputable companies such as Watkins-Johnson Company and Genus, Inc. His experiences at these organizations have influenced his innovative developments in processing technologies.
Collaborations
Mahawili has worked alongside esteemed professionals in his field, including his coworker Timothy J. Boyle. Their collaborations have pursued advancements in chemical vapor deposition techniques, further enriching the technological landscape.
Conclusion
Imad Mahawili stands out as a prominent inventor, contributing valuable developments with his patents in the realm of heating and deposition technologies. His work not only demonstrates ingenuity but also addresses the evolving needs of industries relying on advanced manufacturing processes.