Ilse Van Weperen

Title: Ilse Van Weperen: Innovator in Particle Inspection Technology

Introduction

Ilse Van Weperen is a notable inventor based in Veldhoven, Netherlands. She has made significant contributions to the field of particle inspection technology. Her innovative work has led to the development of a unique device that enhances the detection of particles on substrate surfaces.

Latest Patents

Ilse holds a patent for a "Monolithic particle inspection device." This invention encompasses systems, apparatuses, and methods designed for detecting particles on substrate surfaces. The method involves receiving coherent radiation from a radiation source through a grating structure. It generates a focused coherent radiation beam, which is then transmitted toward a specific region of the substrate surface. The device measures photons scattered from this region and generates an electronic signal to detect any particles present.

Career Highlights

Ilse is currently employed at ASML Netherlands B.V., a leading company in the semiconductor industry. Her role involves working on advanced technologies that are crucial for the production of integrated circuits. Her expertise in particle inspection has positioned her as a valuable asset to her team and the company.

Collaborations

Ilse collaborates with talented colleagues, including Arjan Johannes Anton Beukman and Mohamed Swillam. Their combined efforts contribute to the advancement of technologies in the field of semiconductor manufacturing.

Conclusion

Ilse Van Weperen's innovative contributions to particle inspection technology exemplify her dedication to advancing the semiconductor industry. Her patent and work at ASML Netherlands B.V. highlight her role as a leading inventor in this critical field.