This inventor holds 2 USPTO granted patents. Top assignee: Tokyo Electron Limited. Active years: 2007.
Company Filing History:
Years Active: 2007
Title: Igeta Masonobu: Innovator in Thin Film Technology
Introduction
Igeta Masonobu is a notable inventor based in Fishkill, NY (US), recognized for his contributions to the field of thin film technology. With a total of 2 patents, Masonobu has made significant advancements that enhance the performance of thin films used in various applications.
Latest Patents
Masonobu's latest patents include a method and system for increasing tensile stress in a thin film using multi-frequency electromagnetic radiation. This innovative approach describes how to increase the tensile stress in thin films formed on substrates, such as silicon nitride films. The method involves exposing the thin film to electromagnetic (EM) radiation with a wavelength component of less than about 500 nm. The EM source can include a multi-frequency source of radiation, which is collimated to selectively treat regions of a non-planar film.
Another significant patent by Masonobu is a method and system for increasing tensile stress in a thin film using collimated electromagnetic radiation. This patent also focuses on enhancing the tensile stress in thin films formed on substrates like silicon nitride films. The thin film can be either planar or non-planar, and the method involves anisotropically exposing the film to collimated EM radiation, again with a wavelength component of less than about 500 nm.
Career Highlights
Masonobu is currently employed at Tokyo Electron Limited, where he continues to develop innovative technologies in the semiconductor industry. His work has contributed to advancements in the manufacturing processes of electronic components, particularly in enhancing the properties of thin films.
Collaborations
Masonobu has collaborated with notable colleagues such as Gert J Leusink and Cory Wajda, further enriching his research and development efforts in thin film technology.
Conclusion
Igeta Masonobu's work in thin film technology exemplifies the innovative spirit of modern inventors. His patents not only advance the field but also pave the way for future developments in semiconductor manufacturing.