This inventor holds 1 USPTO granted patent. Top assignee: Ulvac, Inc.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: The Innovative Mind of Hyunhwa Lee
Introduction
Hyunhwa Lee is an inventor based in Pyeongtaek-Si, South Korea. He is known for his innovative approach to etching methods, which are crucial in various manufacturing processes. Although he currently holds no granted patents, his contributions to the field are noteworthy.
Latest Patent Applications
Hyunhwa Lee's latest patent application focuses on an etching method that involves generating reactive plasma containing hydrogen and nitrogen in a discharge tube. This discharge tube has an inner surface formed from an inorganic oxide. The method includes supplying the reactive plasma to a processing chamber connected to the discharge tube. In this chamber, a precursor containing fluorine and hydrogen is generated using the reactive plasma and a gas containing fluorine. This precursor is then supplied to an etching subject arranged in the processing chamber. Additionally, the etching method involves supplying hydrogen plasma to the inner surface of the discharge tube and subsequently supplying oxygen plasma to the inner surface that has been treated with hydrogen plasma.
Conclusion
Hyunhwa Lee's innovative etching method showcases his potential in the field of invention, despite not having any granted patents at this time. His work may pave the way for future advancements in etching technologies.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile