Hyu-Rim Park

Title: Innovations of Hyu-Rim Park

Introduction

Hyu-Rim Park is a notable inventor based in Suwon-si, South Korea. He has made significant contributions to the field of technology, particularly in the area of wafer alignment. With a total of 2 patents to his name, Park's work has had a considerable impact on the semiconductor industry.

Latest Patents

Hyu-Rim Park's latest patents include a wafer aligning apparatus and related method. The first patent describes a wafer aligning apparatus that features a laser sensor generating a trigger signal. This apparatus includes a CCD camera that images a wafer in response to the trigger signal, a signal processing unit that calculates a center alignment correction value for the wafer, and a robot controller that uses this value to control the movement of a transfer robot. The laser sensor detects changes in reflected light, which occur when the boundary between a blade of the transfer robot and a coupler passes under the sensor.

The second patent also focuses on a wafer aligning apparatus and method. In this embodiment, the apparatus comprises an imaging unit that captures an image of a wafer being transferred from a load lock chamber to a transfer chamber. This unit converts the image into digital signals, while the signal processing unit calculates a center alignment correction value by comparing these signals to a master image stored within it. The robot controller then uses this correction value to ensure that the wafer is properly aligned when delivered to a process chamber.

Career Highlights

Hyu-Rim Park is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate and develop new technologies. His work has been instrumental in enhancing the efficiency and accuracy of wafer alignment processes.

Collaborations

Throughout his career, Park has collaborated with talented individuals such as Heok-Jae Lee and Do-In Bae. These collaborations have contributed to the advancement of his inventions and the overall success of his projects.

Conclusion

Hyu-Rim Park is a distinguished inventor whose contributions to wafer alignment technology have made a significant impact in the semiconductor industry. His innovative patents and collaborations reflect his commitment to advancing technology and improving processes.