The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2013
Filed:
Oct. 08, 2010
Heok-jae Lee, Suwon-si, KR;
Sang-ho Kim, Hwaseong-si, KR;
Hyu-rim Park, Suwon-si, KR;
Do-in Bae, Suwon-si, KR;
Kee-weone Seo, Yongin-si, KR;
Chang-woo Woo, Hwaseong-si, KR;
Heok-Jae Lee, Suwon-si, KR;
Sang-Ho Kim, Hwaseong-si, KR;
Hyu-Rim Park, Suwon-si, KR;
Do-In Bae, Suwon-si, KR;
Kee-Weone Seo, Yongin-si, KR;
Chang-Woo Woo, Hwaseong-si, KR;
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Abstract
A wafer aligning apparatus includes a laser sensor that generates a trigger signal, a CCD camera imaging a wafer in response to the trigger signal, a signal processing unit that calculates a center alignment correction value for the wafer, and a robot controller that receives the center alignment correction value to control movement of a transfer robot. The laser sensor generates the trigger signal in accordance with a change in reflected light detected by the laser sensor, the change in the amount of reflected light being detected by the laser sensor when a boundary between a blade of the transfer robot and a coupler of the transfer robot passes under the laser sensor.