Location History:
- Suwon, KR (2018)
- Suwon-si, KR (2020)
Company Filing History:
Years Active: 2018-2020
Title: Hyeong Seop Shin: Innovator in Tungsten Film Technology
Introduction
Hyeong Seop Shin is a notable inventor based in Suwon-si, South Korea. He has made significant contributions to the field of semiconductor manufacturing, particularly in the development of tungsten film technologies. With a total of 2 patents to his name, his work is recognized for its innovative approaches to material deposition.
Latest Patents
Hyeong Seop Shin's latest patents focus on methods for forming low resistivity fluorine-free tungsten films without the need for nucleation layers. One of the key methods involves depositing fluorine-free tungsten by sequential chemical vapor deposition (CVD) pulses. This technique alternates between a fluorine-free tungsten precursor and hydrogen in cycles of temporally separated pulses. Additionally, some methods allow for the direct deposition of tungsten on substrate surfaces using alternating pulses of a chlorine-containing tungsten precursor and hydrogen, without the need for surface treatment. These advancements are crucial for improving the efficiency and performance of semiconductor devices.
Career Highlights
Hyeong Seop Shin is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has positioned him as a key player in the development of advanced deposition technologies. His innovative methods are expected to have a lasting impact on the semiconductor manufacturing process.
Collaborations
Hyeong Seop Shin collaborates with talented professionals in his field, including Hanna Bamnolker and Joshua Collins. These collaborations enhance the research and development efforts at Lam Research Corporation, fostering an environment of innovation and creativity.
Conclusion
Hyeong Seop Shin's contributions to tungsten film technology exemplify the spirit of innovation in the semiconductor industry. His patents and work at Lam Research Corporation highlight the importance of advancing material deposition techniques for future technological developments.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.