Company Filing History:
Years Active: 2000-2002
Title: Innovations of Inventor Hung-Chen Yu
Introduction
Hung-Chen Yu is a notable inventor based in Yi-Lan Hsien, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in processes that enhance the efficiency and effectiveness of etching machines. With a total of 2 patents to his name, Yu's work is recognized for its innovative approaches to complex engineering challenges.
Latest Patents
One of Hung-Chen Yu's latest patents is the "Waferless Seasoning Process." This invention describes a method suitable for an etching chamber of an etching machine when the etching environment is compromised. The process involves a dry cleaning technique utilizing a plasma formed by oxygen and hydrogen bromide to restore the etching environment, ensuring that etching can be performed effectively.
Another significant patent is the "Process for Forming a Shallow Trench Isolation Structure." This method focuses on forming a shallow trench isolation structure by performing a smoothing step on a HDPCVD oxide layer before chemical mechanical polishing (CMP). This innovation reduces the moment resulting from CMP on the peak profile of the oxide layer, preventing the shallow trench isolation structure from being pulled out and minimizing particle damage to the wafer surface.
Career Highlights
Hung-Chen Yu is currently employed at United Microelectronics Corporation, a leading company in the semiconductor industry. His work at this organization has allowed him to apply his innovative ideas and contribute to advancements in semiconductor manufacturing processes.
Collaborations
Yu has collaborated with notable colleagues, including Yu-Chang Chow and Wen-Hua Cheng. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and enhances the development of innovative solutions in their field.
Conclusion
Hung-Chen Yu's contributions to semiconductor technology through his patents and collaborative efforts highlight his role as an influential inventor. His innovative processes not only improve manufacturing efficiency but also pave the way for future advancements in the industry.