Location History:
- Kaohsiung, TW (2010 - 2011)
- Tainan, TW (2013 - 2024)
Company Filing History:
Years Active: 2010-2024
Title: Innovations of Hui-Fang Kuo
Introduction
Hui-Fang Kuo is a prominent inventor based in Tainan, Taiwan. He has made significant contributions to the field of optical technology, holding a total of 10 patents. His work focuses on enhancing photomask layouts and improving exposure tolerance in semiconductor manufacturing.
Latest Patents
Among his latest patents is the "Optical proximity correction device and method." This invention provides an optical proximity correction (OPC) device that includes an analysis unit, a reverse pattern addition unit, a first OPC unit, a second OPC unit, and an output unit. The analysis unit is designed to analyze defect patterns from photomask layouts, while the reverse pattern addition unit generates a reverse pattern within the defect pattern. The first OPC unit performs a comprehensive OPC procedure on the entire photomask layout, and the second OPC unit enhances the exposure tolerance window by focusing on the defect pattern. The output unit then delivers the corrected photomask layout.
Another notable patent is the "Mask set for double exposure process and method of using the mask set." This invention features a mask set that includes a first mask pattern with a base and multiple protruding portions, alongside a second mask pattern that overlaps the first base. This innovative design ensures that the protruding portions interact effectively with the second teeth, optimizing the double exposure process.
Career Highlights
Hui-Fang Kuo is currently employed at United Microelectronics Corporation, a leading company in the semiconductor industry. His expertise in optical proximity correction and mask design has positioned him as a key player in advancing semiconductor manufacturing technologies.
Collaborations
Throughout his career, Kuo has collaborated with talented individuals such as Ming-Jui Chen and Cheng-Te Wang. These partnerships have fostered innovation and contributed to the successful development of his patented technologies.
Conclusion
Hui-Fang Kuo's contributions to optical technology and semiconductor manufacturing are noteworthy. His innovative patents and collaborations reflect his commitment to advancing the field. His work continues to influence the industry and pave the way for future innovations.