Fort Collins, CO, United States of America

Hugh R Grinolds

This inventor holds 1 USPTO granted patent. Top assignee: Cymer, Inc.. Active years: 2007.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Hugh R Grinolds. Retrieved from https://idiyas.com/inventor/hugh-r-grinolds

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile


% Patents Active = 100.0

Average Co-Inventor Count = 4.0

ph-index = 1

Forward Citations = 21(Granted Patents)


Company Filing History:


Years Active: 2007

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1 patent (USPTO):Explore Patents

Title: The Innovations of Hugh R. Grinolds

Introduction

Hugh R. Grinolds is a notable inventor based in Fort Collins, Colorado. He has made significant contributions to the field of optical elements for extreme ultraviolet (EUV) light sources. His work is particularly relevant in the context of plasma-generated EUV light source chambers.

Latest Patents

Hugh R. Grinolds holds a patent for an innovative apparatus and methods for forming plasma-generated EUV light source optical elements. This patent focuses on reflectors comprising multi-layer materials (MLM) that utilize various binary layer materials and capping layers. These advancements are crucial for enhancing the efficiency and effectiveness of plasma-generated EUV light sources, especially when the plasma source material interacts with the MLM materials.

Career Highlights

Grinolds is currently employed at Cymer, Inc., a company renowned for its cutting-edge technology in the semiconductor industry. His work at Cymer has positioned him as a key player in the development of advanced light sources used in lithography.

Collaborations

Throughout his career, Hugh has collaborated with esteemed colleagues such as Norbert R. Bowering and Alexander Igorevich Ershov. These collaborations have further enriched his research and development efforts in the field of optical technologies.

Conclusion

Hugh R. Grinolds is a distinguished inventor whose work in EUV light source optical elements has made a significant impact on the semiconductor industry. His innovative approaches and collaborations continue to drive advancements in this critical area of technology.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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