This inventor holds 1 USPTO granted patent. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2001.
Company Filing History:
Years Active: 2001
Title: Innovations by Huey Ling Chen in Semiconductor Technology
Introduction
Huey Ling Chen is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly through his innovative patent that enhances the precision of semiconductor wafer sectioning.
Latest Patents
One of Huey Ling Chen's key patents is titled "Method for sectioning a semiconductor wafer with FIB for viewing with SEM." This patent describes an improved method for sectioning a semiconductor wafer using a focused ion beam (FIB) apparatus. The innovation allows for a clearer image of the site of the cut, which is formed from secondary electrons produced by the beam. This clarity aids the operator in making more accurate cuts. Prior to the FIB cut, a laser is utilized to cut into the wafer, exposing the lowermost layer of silicon dioxide. The oxide and any splatters from the laser cut are subsequently removed with an oxide etcher. The FIB cut can then be executed without contaminating the viewing area with silicon dioxide. A low beam current is employed for the FIB cut, ensuring precision and quality in the process.
Career Highlights
Huey Ling Chen is currently associated with Taiwan Semiconductor Manufacturing Company Limited, a leading entity in the semiconductor industry. His work has been instrumental in advancing techniques that improve the efficiency and accuracy of semiconductor manufacturing processes.
Collaborations
Throughout his career, Huey has collaborated with esteemed colleagues, including Fouriers Tseng and At Chuan Chen. These partnerships have fostered an environment of innovation and have contributed to the development of cutting-edge technologies in the semiconductor field.
Conclusion
Huey Ling Chen's contributions to semiconductor technology, particularly through his innovative patent, demonstrate his commitment to enhancing manufacturing processes. His work continues to influence the industry and pave the way for future advancements.