Hsinchu, Taiwan

Hsin-Kuo Chang


Average Co-Inventor Count = 5.3

ph-index = 1

Forward Citations = 2(Granted Patents)


Company Filing History:


Years Active: 2015-2020

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3 patents (USPTO):Explore Patents

Title: Hsin-Kuo Chang: Innovator in Semiconductor Technology

Introduction

Hsin-Kuo Chang is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on enhancing the efficiency and effectiveness of semiconductor devices.

Latest Patents

One of Hsin-Kuo Chang's latest patents is an "Apparatus for supporting a semiconductor wafer and method of vibrating a semiconductor wafer." This invention utilizes a vibrator to generate a vibration wave with a variable frequency. The vibrations agitate and facilitate the circulation of processing fluids, which enhances the uniformity and efficiency of semiconductor device features. The vibrator may be a piezoelectric vibrator or similar devices. The invention also addresses the issue of resonance that could potentially damage the semiconductor wafer and its features.

Another notable patent is the "Removal of particles on the back side of wafer." This method involves cleaning a semiconductor wafer during the fabrication process. It includes loading the wafer into a handling system and removing contaminant particles from the edge region of the wafer's back side. The method ensures that alignment marks located in the edge region are preserved while effectively discarding the collected particles.

Career Highlights

Hsin-Kuo Chang is associated with Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His innovative work has contributed to advancements in semiconductor fabrication processes.

Collaborations

Hsin-Kuo Chang has collaborated with notable colleagues such as Jaw-Lih Shih and Hong-Hsing Chou, further enhancing the impact of his inventions in the semiconductor field.

Conclusion

Hsin-Kuo Chang's contributions to semiconductor technology through his patents demonstrate his commitment to innovation and excellence in the industry. His work continues to influence the development of more efficient semiconductor devices.

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