Hsinchu, Taiwan

Hsiang-Sheng Cheng


Average Co-Inventor Count = 3.0

ph-index = 2

Forward Citations = 16(Granted Patents)


Company Filing History:


Years Active: 2002-2004

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2 patents (USPTO):Explore Patents

Title: Hsiang-Sheng Cheng: Innovator in Semiconductor Technology

Introduction

Hsiang-Sheng Cheng is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly through his innovative patents. With a total of 2 patents, Cheng has demonstrated his expertise and commitment to advancing technology in his industry.

Latest Patents

Cheng's latest patents include a "Preventative Maintenance Aided Tool for CVD Chamber" and a "Heater Lift Lead Screw for Vertical Furnaces." The preventative maintenance tool is designed to be installed on a metal chemical vapor deposition (CVD) chamber. It aims to prevent the escape of contaminating and toxic gases during the chamber's preventative maintenance cleaning. The tool features a cylindrical body that fits the lid O-ring of the chamber, creating a gas-tight seal. It also includes a vacuum line connector and a rotatable lid panel with hinged closing panels for effective chamber cleaning.

The heater lift mechanism patent introduces a ball screw linear actuator that provides a maintenance-free lift mechanism with low starting torque and high positional accuracy. This mechanism can also be utilized to move wafer boats in a vertical furnace, showcasing its versatility. The ball screw linear actuator significantly reduces backlash compared to conventional ACME thread lead screws.

Career Highlights

Cheng is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to innovate and contribute to the semiconductor industry. His work has been instrumental in enhancing the efficiency and safety of semiconductor manufacturing processes.

Collaborations

Cheng has collaborated with notable colleagues such as Miao-Cheng Liao and Ying-Lang Wang. Their combined expertise has fostered a productive environment for innovation and development within their field.

Conclusion

Hsiang-Sheng Cheng is a prominent figure in semiconductor technology, with a focus on improving manufacturing processes through his innovative patents. His contributions are vital to the ongoing advancements in the industry, and his work continues to inspire future innovations.

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