Taiwan Semiconductor Manufacturing Comp. Ltd.

Hsiang-Sheng Cheng

Miao-Cheng Liao

Ying-Lang Wang

Chih-Yuan Yang

Hung-Hsin Liang

Sheng-Te Shu

A preventive maintenance tool which may be installed on a metal chemical vapor deposition (CVD) chamber to prevent escape of contaminating and toxic gases from the chamber interior during preventative maintenance (PM) cleaning of the chamber. The tool comprises a cylindrical tool body which fits to the lid O-ring of the chamber to form a gas-tight seal therewith; a vacuum line connector nipple extending from the body for connection to a vacuum line; and a lid panel rotatably mounted in the body and fitted with a pair of hinged closing panels for reversibly sealing the chamber and facilitating chamber cleaning.

Preventative maintenance aided tool for CVD chamber

A heater lift mechanism with a ball screw linear actuator provides a relatively maintenance free lift mechanism with low starting torque and high positional accuracy. The heater lift mechanism can also be used to move wafer boats in a vertical furnace. The ball screw linear actuator has substantially reduced backlash over a conventional ACME thread lead screw.

Growing community of inventors

Hsinchu, Taiwan

Hsiang-Sheng Cheng