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For the Inventor, By the Inventor

Santa Cruz, CA, United States of America

Howard E Grunes

USPTO Granted Patents = 30 

Average Co-Inventor Count = 3.2

ph-index = 20

Forward Citations = 2,449(Granted Patents)


Location History:

  • Santa Clara, CA (US) (1998 - 2006)
  • Santa Cruz, CA (US) (1983 - 2013)

Company Filing History:

goldMedal29 out of 13,684 
 
Applied Materials, Inc.
 patents
silverMedal1 out of 164,108 
 
International Business Machines Corporation
 patents
bronzeMedal1 out of 645 
 
Gas Research Institute
 patents
where one patent can have more than one assignee

Years Active: 1983-2013

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30 patents (USPTO):
1. 8398832 - Coils for generating a plasma and for sputtering (2013-03-19),
2. 7422637 - Processing chamber configured for uniform gas flow (2008-09-09),
3. 7138014 - Electroless deposition apparatus (2006-11-21),
4. 7048837 - End point detection for sputtering and resputtering (2006-05-23),
5. 6824612 - Electroless plating system (2004-11-30),
6. 6799939 - Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers (2004-10-05),
7. 6783639 - Coils for generating a plasma and for sputtering (2004-08-31),
8. 6640151 - Multi-tool control system, method and medium (2003-10-28),
9. 6575737 - Method and apparatus for improved substrate handling (2003-06-10),
10. 6486444 - Load-lock with external staging area (2002-11-26),
11. 6468353 - Method and apparatus for improved substrate handling (2002-10-22),
12. 6409890 - Method and apparatus for forming a uniform layer on a workpiece during sputtering (2002-06-25),
13. 6368469 - Coils for generating a plasma and for sputtering (2002-04-09),
14. 6254746 - Recessed coil for generating a plasma (2001-07-03),
15. 6102164 - Multiple independent robot assembly and apparatus for processing and (2000-08-15),

Title: Howard E Grunes: Pioneering Innovations in Semiconductor Fabrication

Introduction:

Howard E Grunes is a renowned inventor based in Santa Cruz, CA, with an impressive portfolio of 30 patents. His groundbreaking work in semiconductor fabrication has revolutionized the industry, particularly in the development of coils for plasma generation and sputtering.

Latest Patents:

Among his latest patents is the invention of coils for generating a plasma and for sputtering. These coils play a crucial role in semiconductor fabrication systems by coupling energy into a plasma and providing a source of sputtering material for deposition onto workpieces.

Career Highlights:

Grunes has made significant contributions to the field while working with leading companies such as Applied Materials, Inc., and International Business Machines Corporation (IBM). His expertise and innovative solutions have propelled the advancement of semiconductor technologies.

Collaborations:

Throughout his career, Grunes has collaborated with esteemed professionals in the industry, including coworkers Avi Tepman and Zheng Xu. Together, they have worked on cutting-edge projects that have pushed the boundaries of semiconductor fabrication.

Conclusion:

In conclusion, Howard E Grunes stands as a visionary inventor whose dedication to innovation has had a profound impact on the semiconductor industry. His pioneering work in developing coils for plasma generation and sputtering has set new standards for efficiency and precision in semiconductor fabrication processes.

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