Location History:
- Gyeonggi-do, KR (2004 - 2011)
- Yongin-si, KR (2007 - 2012)
Company Filing History:
Years Active: 2004-2012
Title: Innovations of Hong-Seub Kim
Introduction
Hong-Seub Kim is a notable inventor based in Gyeonggi-do, South Korea. He has made significant contributions to the field of plasma technology, holding a total of six patents. His work focuses on advanced apparatuses that enhance the efficiency and effectiveness of plasma generation.
Latest Patents
One of his latest patents is a plasma generating apparatus featuring an antenna with an impedance controller. This innovative apparatus includes a vacuum chamber, an ElectroStatic Chuck (ESC), and an antenna holder. The vacuum chamber is designed with a hollow interior and is sealed at the top by a vacuum plate that has a central through-hole. The ESC is positioned at the internal center of the vacuum chamber, while the antenna unit is located within the chamber beneath the vacuum plate. The antenna cover is coupled to the top of the antenna unit, allowing it to receive and forward an external RF source. Additionally, he has developed a vacuum pumping system, a driving method, and an apparatus for transferring substrates, which includes a transfer unit with a robot and at least one process chamber that alternates between vacuum and atmospheric conditions.
Career Highlights
Throughout his career, Hong-Seub Kim has worked with prominent companies such as Jusung Engineering Co., Ltd. and Jehara Corporation. His experience in these organizations has contributed to his expertise in plasma technology and related fields.
Collaborations
He has collaborated with notable colleagues, including Bu-Jin Ko and Gi-Chung Kwon, further enhancing his innovative work in the industry.
Conclusion
Hong-Seub Kim's contributions to plasma technology through his patents and collaborations highlight his role as a significant inventor in the field. His innovative approaches continue to influence advancements in plasma generation and related technologies.