The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2005
Filed:
Sep. 04, 2002
Gi-chung Kwon, Gyeonggi-do, KR;
Hong-sik Byun, Gyeonggi-do, KR;
Sung-weon Lee, Gyeonggi-do, KR;
Hong-seub Kim, Gyeonggi-do, KR;
Sun-seok Han, Gyeonggi-do, KR;
Bu-jin Ko, Daejeon, KR;
Joung-sik Kim, Choongcheongnam-do, KR;
Gi-Chung Kwon, Gyeonggi-do, KR;
Hong-Sik Byun, Gyeonggi-do, KR;
Sung-Weon Lee, Gyeonggi-do, KR;
Hong-Seub Kim, Gyeonggi-do, KR;
Sun-Seok Han, Gyeonggi-do, KR;
Bu-Jin Ko, Daejeon, KR;
Joung-Sik Kim, Choongcheongnam-do, KR;
Jusung Engineering Co., Ltd., , KR;
Abstract
An electrostatic chuck includes: a metal plate; a dielectric layer on the metal plate, the dielectric layer and the metal plate having a lift pin hole and an injection hole of a cooling gas; a lift pin moving up-and-down through the lift pin hole; first protection insulator on an inner surface of the lift pin hole; and second protection insulator on an inner surface of the injection hole.