The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2010
Filed:
Mar. 08, 2005
Hong-seub Kim, Gyeonggi-do, KR;
Hyun-soo Park, Incheon, KR;
Soon-bin Jung, Gyeonggi-do, KR;
Sung-ho Cha, Seoul, KR;
Dong-jin Kim, Gyeonggi-do, KR;
Wook-jung Hwang, Gyeonggi-do, KR;
Jin-hyuk Yoo, Gyeonggi-do, KR;
Hong-Seub Kim, Gyeonggi-do, KR;
Hyun-Soo Park, Incheon, KR;
Soon-Bin Jung, Gyeonggi-do, KR;
Sung-Ho Cha, Seoul, KR;
Dong-Jin Kim, Gyeonggi-do, KR;
Wook-Jung Hwang, Gyeonggi-do, KR;
Jin-Hyuk Yoo, Gyeonggi-do, KR;
JUSUNG Engineering Co., Ltd., Gwangju-si, Gyeonggi-do, KR;
Abstract
An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.